| Weight | 363.00000 lb | ||
| mass note 11) - (kg) | 165 | ||
| electrical system - alarm | refer to page 94. | ||
| electrical system - breaker capacity - (a) | 30 | ||
| cooling water system - required flow note 10) (50/60 hz) (l/min) | stainless steel, epdm, copper brazing (heat exchanger), pps, silicone, brass | ||
| cooling water system - temperature range - ( c) | 15/15 | ||
| circulating fluid system - port size | stainless steel, epdm, copper brazing (heat exchanger), pps, silicone, fluororesin | ||
| circulating fluid system - main tank capacity note 8) ( l ) | approx. 15 | ||
| circulating fluid system - rated flow note 6) (l/min) | 20 | ||
| circulating fluid system - temperature stability note 4) ( c) | ?0.1 (in cases when the circulating fluid discharge port and the return port are directly connected) | ||
| circulating fluid system - cooling capacity note 3) (kw) | 9(at 20 c) | ||
| circulating fluid system - circulating fluid note 2) | clear water, deionozed water | ||
| control system | pid control | ||
| cooling method | water-cooled refrigeration |
| safety standards | ul, ce marking, semi (s2-0703, s8-0701, f47-0200), sematech (s2-93, s8-95) | ||
| electrical system - communications | contact input/output (d-sub 25 pin) and serial rs-485 (d-sub 25 pin) (refer to pages 92 and 93.) | ||
| electrical system - rated current - (a) | 25 | ||
| electrical system - power supply | 3-phase 200 vac 50 hz, 3-phase 200 to 208 vac 60 hz allowable voltage fluctuation ?10% | ||
| cooling water system - pressure range - (mpa) | rc 1/2 | ||
| cooling water system - wetted parts material | 0.3 to 0.7 | ||
| circulating fluid system - sub-tank capacity note 9) ( l ) | approx. 16 | ||
| circulating fluid system - flow setting range note 7) (l/min) | 10 to 40 (with flow control function by inverter) | ||
| circulating fluid system - pump capacity note 5) (mpa) | max. 0.38 (at 20 l/min) | ||
| circulating fluid system - heating capacity note 3) (kw) | 2.5 (at 20 c) | ||
| circulating fluid system - temperature range setting note 1) ( c) | 10 to 60 | ||
| ambient temperature/humidity note 1) | temperature: 10 to 35 c, humidity: 30 to 70%rh | ||
| refrigerant | r404a (hfc) | ||
| model | hrz010-w2s |
